Authors

Winroth, Gustaf; Younkin, Todd; Blackwell, James M.; Gronheid, Roel

ISSN

1071-1023

Issue

6

Journal

Journal of Vacuum Science and Technology B

Volume

30

Title

Relationship between film thickness loss and polymer deprotection for extreme ultraviolet and ArF photoresists

Publication type

Journal article

Embargo date

9999-12-31