Browsing by author "Stahr, F."
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Very high frequency PECVD SiNx:H for fast deposition of anti-reflection coating and passivation of mc-Si solar cells
Dekkers, Harold; De Wolf, Stefaan; Agostinelli, Guido; Beaucarne, Guy; Stahr, F.; Stephan, U.; Kuske, J.; Schade, K. (2004)