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Very high frequency PECVD SiNx:H for fast deposition of anti-reflection coating and passivation of mc-Si solar cells
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Authors
Dekkers, Harold
;
De Wolf, Stefaan
;
Agostinelli, Guido
;
Beaucarne, Guy
;
Stahr, F.
;
Stephan, U.
;
Kuske, J.
;
Schade, K.
Conference
19th European Photovoltaic Solar Energy Conference and Exhibition
Title
Very high frequency PECVD SiNx:H for fast deposition of anti-reflection coating and passivation of mc-Si solar cells
Publication type
Proceedings paper
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