Publication:
Very high frequency PECVD SiNx:H for fast deposition of anti-reflection coating and passivation of mc-Si solar cells
Date
| dc.contributor.author | Dekkers, Harold | |
| dc.contributor.author | De Wolf, Stefaan | |
| dc.contributor.author | Agostinelli, Guido | |
| dc.contributor.author | Beaucarne, Guy | |
| dc.contributor.author | Stahr, F. | |
| dc.contributor.author | Stephan, U. | |
| dc.contributor.author | Kuske, J. | |
| dc.contributor.author | Schade, K. | |
| dc.contributor.imecauthor | Dekkers, Harold | |
| dc.contributor.orcidimec | Dekkers, Harold::0000-0003-4778-5709 | |
| dc.date.accessioned | 2021-10-15T13:11:30Z | |
| dc.date.available | 2021-10-15T13:11:30Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8826 | |
| dc.source.beginpage | 982 | |
| dc.source.conference | 19th European Photovoltaic Solar Energy Conference and Exhibition | |
| dc.source.conferencedate | 7/06/2004 | |
| dc.source.conferencelocation | Paris France | |
| dc.source.endpage | 985 | |
| dc.title | Very high frequency PECVD SiNx:H for fast deposition of anti-reflection coating and passivation of mc-Si solar cells | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |