Browsing by author "Baiya, Evans"

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Poly- silicon etch with diluted ammonia: application to replacement gate integration scheme

Sebaai, Farid; del Agua Borniquel, Jose Ignacio; Vos, Rita; Absil, Philippe; Chiarella, Thomas; Vrancken, Christa; Boelen, Pieter; Baiya, Evans (2009)