Poly- silicon etch with diluted ammonia: application to replacement gate integration scheme

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Authors

Sebaai, Farid; del Agua Borniquel, Jose Ignacio; Vos, Rita; Absil, Philippe; Chiarella, Thomas; Vrancken, Christa; Boelen, Pieter; Baiya, Evans

ISSN

1662-9779

Journal

Solid State Phenomena

Volume

145-146

Title

Poly- silicon etch with diluted ammonia: application to replacement gate integration scheme

Publication type

Journal article

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