Browsing by author "Granneman, E. H. A."

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A new HF vapor native oxide removal process for cluster applications

Sprey, Hessel; Storm, Arjen; Maes, Jan; Granneman, E. H. A.; Hendriks, Marton; Röhr, Erika; Caymax, Matty; Decoutere, Stefaan; Heyns, Marc (1998)