Authors

Sprey, Hessel; Storm, Arjen; Maes, Jan; Granneman, E. H. A.; Hendriks, Marton; Röhr, Erika; Caymax, Matty; Decoutere, Stefaan; Heyns, Marc

Conference

Proceedings of the Symposium on Contamination Free Manufacturing for Semiconductor Manufacturing; SEMICON West

Title

A new HF vapor native oxide removal process for cluster applications

Publication type

Proceedings paper

Embargo date

9999-12-31