Browsing by author "Spieser, Martin"
Now showing items 1-2 of 2
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Conversion of a patterned organic resist into a high performance inoriganic hard mask for high resolution pattern transfer
de Marneffe, Jean-Francois; Chan, BT; Spieser, Martin; Vereecke, Guy; Naumov, Sergej; Vanhaeren, Danielle; Knoll, Armin; Wolf, Heiko (2018) -
Integration of the Sequential Infiltration Synthesis (SIS) on Polyphtaladehyde (PPA) resist for thermal Scanning Probe Lithography (t-SPL) patterning
Chan, BT; de Marneffe, Jean-Francois; Spieser, Martin; Knoll, Armin; Knaepen, Werner (2017)