Publication:
Integration of the Sequential Infiltration Synthesis (SIS) on Polyphtaladehyde (PPA) resist for thermal Scanning Probe Lithography (t-SPL) patterning
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1977 since deposited on 2021-10-24
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Acq. date: 2026-02-26
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Views
1977 since deposited on 2021-10-24
1last month
1last week
Acq. date: 2026-02-26
Citations