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Integration of the Sequential Infiltration Synthesis (SIS) on Polyphtaladehyde (PPA) resist for thermal Scanning Probe Lithography (t-SPL) patterning
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1976 since deposited on 2021-10-24
Acq. date: 2025-12-10
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Metrics
Views
1976 since deposited on 2021-10-24
Acq. date: 2025-12-10
Citations