Publication:
Conversion of a patterned organic resist into a high performance inoriganic hard mask for high resolution pattern transfer
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1896 since deposited on 2021-10-25
1last month
Acq. date: 2026-03-17
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Statistics
Views
1896 since deposited on 2021-10-25
1last month
Acq. date: 2026-03-17
Citations