Browsing by author "Koumoto, T."

Now showing items 1-2 of 2

In-line and non-destructive analysis of epitaxial Si1-x-yGexCy

Loo, Roger; Delhougne, Romain; Geenen, Luc; Brijs, Bert; Vandervorst, Wilfried; Meunier-Beillard, Philippe; Koumoto, T. (2004)
In-line and non-destructive analysis of epitaxial Si1-x-yGexCy by spectroscopic ellipsometry and comparison with other established techniques

Loo, Roger; Meunier-Beillard, Philippe; Delhougne, Romain; Koumoto, T.; Geenen, Luc; Brijs, Bert; Vandervorst, Wilfried (2003)