In-line and non-destructive analysis of epitaxial Si1-x-yGexCy

Metadata

Show full item record

Authors

Loo, Roger; Delhougne, Romain; Geenen, Luc; Brijs, Bert; Vandervorst, Wilfried; Meunier-Beillard, Philippe; Koumoto, T.

Issue

2

Journal

Yield Management Solutions

Volume

6

Title

In-line and non-destructive analysis of epitaxial Si1-x-yGexCy

Publication type

Journal article

Collections

Articles