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In-line and non-destructive analysis of epitaxial Si1-x-yGexCy
Publication:
In-line and non-destructive analysis of epitaxial Si1-x-yGexCy
Date
2004
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Loo, Roger
;
Delhougne, Romain
;
Geenen, Luc
;
Brijs, Bert
;
Vandervorst, Wilfried
;
Meunier-Beillard, Philippe
;
Koumoto, T.
Journal
Yield Management Solutions
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1908
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
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Views
1908
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations