Browsing by author "Mizutani, Atsushi"
Now showing items 1-3 of 3
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Cobalt pre-metallization clean and functional water rinse in BEOL interconnect
Kesters, Els; Le, Quoc Toan; van der Veen, Marleen; Akanishi, Yuya; Hideaki, Iino; Mizutani, Atsushi; Holsteyns, Frank (2019) -
Effect of cleaning chemistries on cobalt: surface chemistries
Le, Quoc Toan; Kesters, Els; Akanishi, Yuya; van der Veen, Marleen; Mizutani, Atsushi; Holsteyns, Frank (2018) -
Integrated clean for TSV: comparison between dry process and wet processes and their electrical qualification
Suhard, Samuel; Li, Yunlong; Iwasaki, Akihisa; Van Huylenbroeck, Stefaan; Draper, Simon; Mizutani, Atsushi; Dory, Thomas; Holsteyns, Frank (2016)