Authors

Suhard, Samuel; Li, Yunlong; Iwasaki, Akihisa; Van Huylenbroeck, Stefaan; Draper, Simon; Mizutani, Atsushi; Dory, Thomas; Holsteyns, Frank

Conference

IEEE 18th Electronics Packaging Technology Conference - EPTC

Title

Integrated clean for TSV: comparison between dry process and wet processes and their electrical qualification

Publication type

Proceedings paper

Embargo date

9999-12-31