Browsing by author "Collart, E."

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Ultra-shallow junctions formed by C co-implantation with spkie plus sub-melt laser annealing

Felch, S.B.; Collart, E.; Parihar, V.; Thirupapulyur, S.; Schreutelkamp, R.; Pawlak, Bartek; Hoffmann, Thomas Y.; Severi, Simone; Eyben, Pierre; Vandervorst, Wilfried; Noda, Taiji (2008)