Authors

Felch, S.B.; Collart, E.; Parihar, V.; Thirupapulyur, S.; Schreutelkamp, R.; Pawlak, Bartek; Hoffmann, Thomas Y.; Severi, Simone; Eyben, Pierre; Vandervorst, Wilfried; Noda, Taiji

ISSN

1071-1023

Issue

1

Journal

Journal of Vacuum Science and Technology B

Volume

26

Title

Ultra-shallow junctions formed by C co-implantation with spkie plus sub-melt laser annealing

Publication type

Journal article

Embargo date

9999-12-31