Publication:

Ultra-shallow junctions formed by C co-implantation with spkie plus sub-melt laser annealing

Date

2008
Journal article
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Author(s)

Felch, S.B.
;
Collart, E.
;
Parihar, V.
;
Thirupapulyur, S.
;
Schreutelkamp, R.
;
Pawlak, Bartek  
;
Hoffmann, Thomas Y.
;
Severi, Simone  
;
Eyben, Pierre  
;
Vandervorst, Wilfried  
;
Noda, Taiji

Journal

Journal of Vacuum Science and Technology B

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1980 since deposited on 2021-10-17
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