Browsing by author "Petzold, M."
Now showing items 1-1 of 1
-
Strained silicon on wafer level by wafer bonding: materials processing, strain measurements and strain relaxation
Reiche, M.; Moutanabbir, O.; Himcinschi, C.; Christiansen, S.; Erfurth, E.; Goesele, U.; Mantl, S.; Buca, D.; Zhao, Q. T.; Loo, Roger; Nguyen, Duy; Muster, F.; Petzold, M. (2008)