Browsing by author "Docherty, F.T."
Now showing items 1-3 of 3
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A nanoanalytical investigation of elemental distributions in high-k dielectric gate stacks on silicon
Docherty, F.T.; MacKenzie, M.; Craven, A.J.; McComb, D.W.; De Gendt, Stefan; McFadzean, S.; McGilvery, C.M. (2008-01) -
Advanced nanoanalysis of a Hf-based high-k dielectric stack prior to activation
MacKenzie, M.; Craven, A.J.; McComb, D.W.; De Gendt, Stefan; Docherty, F.T.; McGilvery, C.M.; McFadzean, S. (2007) -
Nucleation, crystallization and phase segregation in HfO2 and HfSiO
McGilvery, C.M.; McFadzean, S.; Docherty, F.T.; Craven, A.J.; McComb, D.W.; De Gendt, Stefan (2007)