Authors

Docherty, F.T.; MacKenzie, M.; Craven, A.J.; McComb, D.W.; De Gendt, Stefan; McFadzean, S.; McGilvery, C.M.

ISSN

0167-9317

Issue

1

Journal

Microelectronic Engineering

Volume

85

Title

A nanoanalytical investigation of elemental distributions in high-k dielectric gate stacks on silicon

Publication type

Journal article

Embargo date

9999-12-31