Publication:

A nanoanalytical investigation of elemental distributions in high-k dielectric gate stacks on silicon

Date

2008-01
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorDocherty, F.T.
dc.contributor.authorMacKenzie, M.
dc.contributor.authorCraven, A.J.
dc.contributor.authorMcComb, D.W.
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorMcFadzean, S.
dc.contributor.authorMcGilvery, C.M.
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-17T06:55:59Z
dc.date.available2021-10-17T06:55:59Z
dc.date.embargo9999-12-31
dc.date.issued2008-01
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13670
dc.source.beginpage61
dc.source.endpage64
dc.source.issue1
dc.source.journalMicroelectronic Engineering
dc.source.volume85
dc.title

A nanoanalytical investigation of elemental distributions in high-k dielectric gate stacks on silicon

dc.typeJournal article
dspace.entity.typePublication
Files

Original bundle

Name:
15266.pdf
Size:
363.66 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Articles