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A nanoanalytical investigation of elemental distributions in high-k dielectric gate stacks on silicon
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A nanoanalytical investigation of elemental distributions in high-k dielectric gate stacks on silicon
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Date
2008-01
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Docherty, F.T.
;
MacKenzie, M.
;
Craven, A.J.
;
McComb, D.W.
;
De Gendt, Stefan
;
McFadzean, S.
;
McGilvery, C.M.
Journal
Microelectronic Engineering
Abstract
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1901
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Acq. date: 2025-12-15
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Views
1901
since deposited on 2021-10-17
1
last month
Acq. date: 2025-12-15
Citations