Browsing by author "Braggin, Jennifer"
Now showing items 1-4 of 4
-
Analysis of the effect of point-of-use filtration on microbridging defectivity
Braggin, Jennifer; Gronheid, Roel; Cheng, Shaunee; Van Den Heuvel, Dieter; Bernard, Sophie; Foubert, Philippe; Rosslee, Craig (2009) -
Characterizing immersion lithography micro bridge defects using advanced features of teh SEMVision G3 STAR FIB
Van Den Heuvel, Dieter; Santoro, Gaetano; Gronheid, Roel; Braggin, Jennifer; Rosslee, Craig; Leray, Philippe; Cheng, Shaunee; Schreutelkamp, Rob; Hillel, Noam (2009) -
Micro-bridge defects: characterization and root cause analysis
Santoro, Gaetano; Van Den Heuvel, Dieter; Braggin, Jennifer; Rosslee, Craig; Leray, Philippe; Cheng, Shaunee; Jehoul, Christiane; Schreutelkamp, Rob; Hillel, Noam (2010) -
Point-of-use filtration methods to reduce defectivity
Braggin, Jennifer; Schollaert, Wim; Hoshiko, Kenji; Buch, X. (2010)