Micro-bridge defects: characterization and root cause analysis

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Authors
Santoro, Gaetano; Van Den Heuvel, Dieter; Braggin, Jennifer; Rosslee, Craig; Leray, Philippe; Cheng, Shaunee; Jehoul, Christiane; Schreutelkamp, Rob; Hillel, Noam
Conference
Metrology, Inspection and Process Control for Microlithography XXIV
Title
Micro-bridge defects: characterization and root cause analysis
Publication type
Proceedings paper
Embargo date
9999-12-31
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