Publication:

Micro-bridge defects: characterization and root cause analysis

Date

2010
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorSantoro, Gaetano
dc.contributor.authorVan Den Heuvel, Dieter
dc.contributor.authorBraggin, Jennifer
dc.contributor.authorRosslee, Craig
dc.contributor.authorLeray, Philippe
dc.contributor.authorCheng, Shaunee
dc.contributor.authorJehoul, Christiane
dc.contributor.authorSchreutelkamp, Rob
dc.contributor.authorHillel, Noam
dc.contributor.imecauthorSantoro, Gaetano
dc.contributor.imecauthorVan Den Heuvel, Dieter
dc.contributor.imecauthorLeray, Philippe
dc.contributor.imecauthorJehoul, Christiane
dc.date.accessioned2021-10-18T21:15:13Z
dc.date.available2021-10-18T21:15:13Z
dc.date.embargo9999-12-31
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17942
dc.source.beginpage763820
dc.source.conferenceMetrology, Inspection and Process Control for Microlithography XXIV
dc.source.conferencedate21/02/2010
dc.source.conferencelocationSan Jose, CA USA
dc.title

Micro-bridge defects: characterization and root cause analysis

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
20413.pdf
Size:
1.21 MB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions