Browsing by author "Zhang, Yide"
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Carbon nanotube EUV pellicle tunability and performance in a scanner-like environment
Timmermans, Marina; Pollentier, Ivan; Korytov, Maxim; Nuytten, Thomas; Sergeant, Stefanie; Conard, Thierry; Meersschaut, Johan; Zhang, Yide; Dialameh, Masoud; Alaerts, Wilfried; Jazaeri, Ehsan; Spampinato, Valentina; Franquet, Alexis; Brems, Steven; Huyghebaert, Cedric; Gallagher, Emily (2021) -
CNT EUV pellicle tunability and performance in a scanner-like environment
Timmermans, Marina; Pollentier, Ivan; Korytov, Maxim; Nuytten, Thomas; Sergeant, Stefanie; Conard, Thierry; Meersschaut, Johan; Zhang, Yide; Dialameh, Masoud; Alaerts, Wilfried; Jazaeri, Ehsan; Spampinato, Valentina; Franquet, Alexis; Brems, Steven; Huyghebaert, Cedric; Gallagher, Emily (2021)