Carbon nanotube EUV pellicle tunability and performance in a scanner-like environment

View/open

Published version (17.82Mb)

Metadata

Show full item record

Authors

Timmermans, Marina; Pollentier, Ivan; Korytov, Maxim; Nuytten, Thomas; Sergeant, Stefanie; Conard, Thierry; Meersschaut, Johan; Zhang, Yide; Dialameh, Masoud; Alaerts, Wilfried; Jazaeri, Ehsan; Spampinato, Valentina; Franquet, Alexis; Brems, Steven; Huyghebaert, Cedric; Gallagher, Emily

DOI

10.1117/1.JMM.20.3.031010

ISSN

1932-5150

Issue

3

Journal

JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3

Volume

20

Title

Carbon nanotube EUV pellicle tunability and performance in a scanner-like environment

Publication type

Journal article

Embargo date

2021-07-31

Collections

Articles