Publication:

Carbon nanotube EUV pellicle tunability and performance in a scanner-like environment

Date

2021
Journal article
https://doi.org/10.1117/1.JMM.20.3.031010
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

Published version 17.83 MB

Author(s)

Timmermans, Marina  
;
Pollentier, Ivan  
;
Korytov, Maxim  
;
Nuytten, Thomas  
;
Sergeant, Stefanie  
;
Conard, Thierry  
;
Meersschaut, Johan  
;
Zhang, Yide  
;
Dialameh, Masoud  
;
Alaerts, Wilfried  
;
Jazaeri, Ehsan  
;
Spampinato, Valentina  
;
Franquet, Alexis  
;
Brems, Steven  
;
Huyghebaert, Cedric  
;
Gallagher, Emily  

Journal

JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3

Abstract

Description

Statistics

Downloads

404 since deposited on 2021-11-02
128last month
23last week
Acq. date: 2026-02-04

Views

1503 since deposited on 2021-11-02
7last month
1last week
Acq. date: 2026-02-04

Citations

Statistics

Downloads

404 since deposited on 2021-11-02
128last month
23last week
Acq. date: 2026-02-04

Views

1503 since deposited on 2021-11-02
7last month
1last week
Acq. date: 2026-02-04

Citations