Publication:

Carbon nanotube EUV pellicle tunability and performance in a scanner-like environment

Date

2021
Journal article
https://doi.org/10.1117/1.JMM.20.3.031010
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Published version 17.83 MB

Author(s)

Timmermans, Marina  
;
Pollentier, Ivan  
;
Korytov, Maxim  
;
Nuytten, Thomas  
;
Sergeant, Stefanie  
;
Conard, Thierry  
;
Meersschaut, Johan  
;
Zhang, Yide  
;
Dialameh, Masoud  
;
Alaerts, Wilfried  
;
Jazaeri, Ehsan  
;
Spampinato, Valentina  
;
Franquet, Alexis  
;
Brems, Steven  
;
Huyghebaert, Cedric  
;
Gallagher, Emily  

Journal

JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3

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