Publication:

Carbon nanotube EUV pellicle tunability and performance in a scanner-like environment

Date

2021
Journal article
https://doi.org/10.1117/1.JMM.20.3.031010
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dc.contributor.authorTimmermans, Marina
dc.contributor.authorPollentier, Ivan
dc.contributor.authorKorytov, Maxim
dc.contributor.authorNuytten, Thomas
dc.contributor.authorSergeant, Stefanie
dc.contributor.authorConard, Thierry
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorZhang, Yide
dc.contributor.authorDialameh, Masoud
dc.contributor.authorAlaerts, Wilfried
dc.contributor.authorJazaeri, Ehsan
dc.contributor.authorSpampinato, Valentina
dc.contributor.authorFranquet, Alexis
dc.contributor.authorBrems, Steven
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorGallagher, Emily
dc.contributor.imecauthorTimmermans, Marina
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.imecauthorKorytov, Maxim
dc.contributor.imecauthorNuytten, Thomas
dc.contributor.imecauthorSergeant, Stefanie
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorZhang, Yide
dc.contributor.imecauthorDialameh, Masoud
dc.contributor.imecauthorAlaerts, Wilfried
dc.contributor.imecauthorJazaeri, Ehsan
dc.contributor.imecauthorSpampinato, Valentina
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorBrems, Steven
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorGallagher, Emily
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.contributor.orcidimecNuytten, Thomas::0000-0002-5921-6928
dc.contributor.orcidimecSergeant, Stefanie::0000-0001-9923-0903
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecDialameh, Masoud::0000-0002-1439-590X
dc.contributor.orcidimecSpampinato, Valentina::0000-0003-3225-6740
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecBrems, Steven::0000-0002-0282-8528
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.contributor.orcidimecTimmermans, Marina::0000-0001-9805-8259
dc.contributor.orcidimecGallagher, Emily::0000-0002-2927-8298
dc.date.accessioned2023-01-19T09:26:22Z
dc.date.available2021-11-02T15:55:45Z
dc.date.available2023-01-19T09:26:22Z
dc.date.embargo2021-07-31
dc.date.issued2021
dc.identifier.doi10.1117/1.JMM.20.3.031010
dc.identifier.issn1932-5150
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/37466
dc.publisherSPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
dc.source.beginpage031010
dc.source.endpagena
dc.source.issue3
dc.source.journalJOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3
dc.source.numberofpages22
dc.source.volume20
dc.subject.keywordsELECTRON-BEAM
dc.subject.keywordsRAMAN-SPECTROSCOPY
dc.subject.keywordsPURIFICATION
dc.subject.keywordsHYDROGENATION
dc.title

Carbon nanotube EUV pellicle tunability and performance in a scanner-like environment

dc.typeJournal article
dspace.entity.typePublication
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