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Carbon nanotube EUV pellicle tunability and performance in a scanner-like environment

dc.contributor.authorTimmermans, Marina
dc.contributor.authorPollentier, Ivan
dc.contributor.authorKorytov, Maxim
dc.contributor.authorNuytten, Thomas
dc.contributor.authorSergeant, Stefanie
dc.contributor.authorConard, Thierry
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorZhang, Yide
dc.contributor.authorDialameh, Masoud
dc.contributor.authorAlaerts, Wilfried
dc.contributor.authorJazaeri, Ehsan
dc.contributor.authorSpampinato, Valentina
dc.contributor.authorFranquet, Alexis
dc.contributor.authorBrems, Steven
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorGallagher, Emily
dc.date.accessioned2023-01-19T09:26:22Z
dc.date.available2021-11-02T15:55:45Z
dc.date.available2023-01-19T09:26:22Z
dc.date.issued2021
dc.identifier.issn1932-5150
dc.identifier.otherWOS:000703599200005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/37466.2
dc.sourceWOS
dc.titleCarbon nanotube EUV pellicle tunability and performance in a scanner-like environment
dc.typeJournal article
dc.contributor.imecauthorTimmermans, Marina
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.imecauthorKorytov, Maxim
dc.contributor.imecauthorNuytten, Thomas
dc.contributor.imecauthorSergeant, Stefanie
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorZhang, Yide
dc.contributor.imecauthorDialameh, Masoud
dc.contributor.imecauthorAlaerts, Wilfried
dc.contributor.imecauthorJazaeri, Ehsan
dc.contributor.imecauthorSpampinato, Valentina
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorBrems, Steven
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorGallagher, Emily
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.contributor.orcidimecNuytten, Thomas::0000-0002-5921-6928
dc.contributor.orcidimecSergeant, Stefanie::0000-0001-9923-0903
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecDialameh, Masoud::0000-0002-1439-590X
dc.contributor.orcidimecSpampinato, Valentina::0000-0003-3225-6740
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecBrems, Steven::0000-0002-0282-8528
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.contributor.orcidimecTimmermans, Marina::0000-0001-9805-8259
dc.contributor.orcidimecGallagher, Emily::0000-0002-2927-8298
dc.date.embargo2021-07-31
dc.identifier.doi10.1117/1.JMM.20.3.031010
dc.source.numberofpages22
dc.source.peerreviewyes
dc.source.beginpage031010
dc.source.endpagena
dc.source.journalJOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3
dc.source.issue3
dc.source.volume20
imec.availabilityPublished - open access


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220.500.12860/37466.2*2023-01-19T09:18:52Zvalidation by library/open access desk
120.500.12860/374662021-11-02T15:55:45Z

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