Browsing by author "Nuytten, Thomas"

Advanced Raman spectroscopy using nanofocusing of light

Nuytten, Thomas; Bogdanowicz, Janusz; Hantschel, Thomas; Schulze, Andreas; Favia, Paola; Bender, Hugo; De Wolf, Ingrid; Vandervorst, Wilfried (2017)

Advances in metrology for complex epitaxial systems embedded in small volums

Vandervorst, Wilfried; Kumar, Arul; Meersschaut, Johan; Franquet, Alexis; Douhard, Bastien; Delmotte, Joris; Conard, Thierry; Nuytten, Thomas; Hantschel, Thomas; Loo, Roger (2015-05)

Anisotropic biaxial stress measurements in finFET channels through nano-focused raman spectroscopy

Nuytten, Thomas; Jamal, Muhammad Tahir; Hantschel, Thomas; Bogdanowicz, Janusz; Schulze, Andreas; Favia, Paola; Bender, Hugo; De Wolf, Ingrid; Vandervorst, Wilfried (2016)

Anisotropic stress in narrow sGe fin field-effect transistor channels measured using nano-focused Raman spectroscopy

Nuytten, Thomas; Bogdanowicz, Janusz; Witters, Liesbeth; Eneman, Geert; Hantschel, Thomas; Schulze, Andreas; Favia, Paola; Bender, Hugo; De Wolf, Ingrid; Vandervorst, Wilfried (2018)

Atomic layer deposition of 2D transition metal dichalogenides

Delabie, Annelies; Caymax, Matty; Groven, Benjamin; Heyne, Markus; Haesevoets, Karel; Meersschaut, Johan; Nuytten, Thomas; Bender, Hugo; Conard, Thierry; Verdonck, Patrick; Van Elshocht, Sven; Heyns, Marc; Barla, Kathy; Radu, Iuliana; Thean, Aaron (2015-10)

Automated control of the nanoprober system for nanoscale electrical measurements

Arstila, Kai; Hantschel, Thomas; Nuytten, Thomas (2013)

Boron doped nanodiamonds for nanoelectronics applications

Hantschel, Thomas; Yeghoyan, taguhi; Nuytten, Thomas; Nunn, Nicholas; Shenderova, Olga; Vandervorst, Wilfried (2016)

C atom distribution in Si:C and Si:C:P epitaxial layers studied using Raman spectroscopy

Dhayalan, Sathish Kumar; Nuytten, Thomas; Loo, Roger; Rosseel, Erik; Hikavyy, Andriy; Shimura, Yosuke; Vandervorst, Wilfried (2015-05)

Carbon nanotube EUV pellicle tunability and performance in a scanner-like environment

Timmermans, Marina; Pollentier, Ivan; Korytov, Maxim; Nuytten, Thomas; Sergeant, Stefanie; Conard, Thierry; Meersschaut, Johan; Zhang, Yide; Dialameh, Masoud; Alaerts, Wilfried; Jazaeri, Ehsan; Spampinato, Valentina; Franquet, Alexis; Brems, Steven; Huyghebaert, Cedric; Gallagher, Emily (2021)

Characterization of interface interactions between Graphene and Ruthenium

Achra, Swati; Wu, Xiangyu; Trepalin, Vadim; Nuytten, Thomas; Ludwig, Jonathan; Brems, Steven; Afanasiev, Valeri; Huyghebaert, Cedric; Soree, Bart; Asselberghs, Inge; Tokei, Zsolt (2020)

CNT EUV pellicle tunability and performance in a scanner-like environment

Timmermans, Marina; Pollentier, Ivan; Korytov, Maxim; Nuytten, Thomas; Sergeant, Stefanie; Conard, Thierry; Meersschaut, Johan; Zhang, Yide; Dialameh, Masoud; Alaerts, Wilfried; Jazaeri, Ehsan; Spampinato, Valentina; Franquet, Alexis; Brems, Steven; Huyghebaert, Cedric; Gallagher, Emily (2021)

Comparative study of the growth behaviour of 2D WS2 by Atomic Layer Deposition (ALD) and Chemical Vapor Deposition (CVD), and the impact on the 2D crystal structure

Groven, Benjamin; Claes, Dieter; Heyne, Markus; Meersschaut, Johan; Nuytten, Thomas; Richard, Olivier; Bender, Hugo; Conard, Thierry; Verdonck, Patrick; Van Elshocht, Sven; Radu, Iuliana; Thean, Aaron; Heyns, Marc; Caymax, Matty; Delabie, Annelies (2016)

Compositional and strain metrology in nanoscale structures using Raman spectroscopy

Nuytten, Thomas (2019)

Correlative 3D strain analysis in nanometer-sized semiconductor devices by precession electron diffraction, raman spectroscopy and FE simulations

Nanakoudis, Antonis; Nuytten, Thomas; Bender, Hugo; Vandervorst, Wilfried; Bals, Sara; Verbeeck, Jo (2017)

Critical dimension metrology using Raman spectroscopy

Gawlik, Andrzej; Bogdanowicz, Janusz; Nuytten, Thomas; Charley, Anne-Laure; Teugels, Lieve; Misiewicz, Jan; Vandervorst, Wilfried (2020)

Defects reduction and characterization of epitaxial Si:C/Si:C:P layers grown using cyclic deposition and etching technique

Dhayalan, Sathish Kumar; Loo, Roger; Rosseel, Erik; Hikavyy, Andriy; Shimura, Yosuke; Nuytten, Thomas; Douhard, Bastien; Vandervorst, Wilfried (2014)