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Diamond scanning probes with sub-nanometer resolution for advanced nanoelectronics device characterization
Publication:
Diamond scanning probes with sub-nanometer resolution for advanced nanoelectronics device characterization
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Date
2016
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hantschel, Thomas
;
Tsigkourakos, Menelaos
;
Zha, Lichen
;
Nuytten, Thomas
;
Paredis, Kristof
;
Vandervorst, Wilfried
Journal
Microelectronic Engineering
Abstract
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1970
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Acq. date: 2026-01-09
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Views
1970
since deposited on 2021-10-23
1
last month
Acq. date: 2026-01-09
Citations