Authors

Hantschel, Thomas; Tsigkourakos, Menelaos; Zha, Lichen; Nuytten, Thomas; Paredis, Kristof; Vandervorst, Wilfried

ISSN

0167-9317

Journal

Microelectronic Engineering

Volume

159

Title

Diamond scanning probes with sub-nanometer resolution for advanced nanoelectronics device characterization

Publication type

Journal article

Embargo date

9999-12-31