Diamond scanning probes with sub-nanometer resolution for advanced nanoelectronics device characterization

dc.contributor.author	Hantschel, Thomas
dc.contributor.author	Tsigkourakos, Menelaos
dc.contributor.author	Zha, Lichen
dc.contributor.author	Nuytten, Thomas
dc.contributor.author	Paredis, Kristof
dc.contributor.author	Vandervorst, Wilfried
dc.contributor.imecauthor	Hantschel, Thomas
dc.contributor.imecauthor	Zha, Lichen
dc.contributor.imecauthor	Nuytten, Thomas
dc.contributor.imecauthor	Paredis, Kristof
dc.contributor.imecauthor	Vandervorst, Wilfried
dc.contributor.orcidimec	Hantschel, Thomas::0000-0001-9476-4084
dc.contributor.orcidimec	Nuytten, Thomas::0000-0002-5921-6928
dc.contributor.orcidimec	Paredis, Kristof::0000-0002-5163-4164
dc.date.accessioned	2021-10-23T11:07:21Z
dc.date.available	2021-10-23T11:07:21Z
dc.date.embargo	9999-12-31
dc.date.issued	2016
dc.identifier.issn	0167-9317
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/26690
dc.identifier.url	http://www.sciencedirect.com/science/article/pii/S0167931716300946
dc.source.beginpage	46
dc.source.endpage	50
dc.source.journal	Microelectronic Engineering
dc.source.volume	159
dc.title	Diamond scanning probes with sub-nanometer resolution for advanced nanoelectronics device characterization
dc.type	Journal article
dspace.entity.type	Publication
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