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Diamond scanning probes with sub-nanometer resolution for advanced nanoelectronics device characterization
Publication:
Diamond scanning probes with sub-nanometer resolution for advanced nanoelectronics device characterization
Date
2016
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hantschel, Thomas
;
Tsigkourakos, Menelaos
;
Zha, Lichen
;
Nuytten, Thomas
;
Paredis, Kristof
;
Vandervorst, Wilfried
Journal
Microelectronic Engineering
Abstract
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1965
since deposited on 2021-10-23
Acq. date: 2025-10-23
Citations
Metrics
Views
1965
since deposited on 2021-10-23
Acq. date: 2025-10-23
Citations