Authors

Dhayalan, Sathish Kumar; Loo, Roger; Rosseel, Erik; Hikavyy, Andriy; Shimura, Yosuke; Nuytten, Thomas; Douhard, Bastien; Vandervorst, Wilfried

Conference

E-MRS Fall meeting Symposium J: Alternative Semiconductor Integration in Si Microelectronics

Title

Defects reduction and characterization of epitaxial Si:C/Si:C:P layers grown using cyclic deposition and etching technique

Publication type

Meeting abstract

Embargo date

9999-12-31