C atom distribution in Si:C and Si:C:P epitaxial layers studied using Raman spectroscopy

Thumbnail
Metadata
Show full item record
Authors
Dhayalan, Sathish Kumar; Nuytten, Thomas; Loo, Roger; Rosseel, Erik; Hikavyy, Andriy; Shimura, Yosuke; Vandervorst, Wilfried
Conference
9th International Conference on Silicon Epitaxy and Heterostructures - ICSI9
Title
C atom distribution in Si:C and Si:C:P epitaxial layers studied using Raman spectroscopy
Publication type
Meeting abstract
Collections