Publication:

C atom distribution in Si:C and Si:C:P epitaxial layers studied using Raman spectroscopy

Date

2015-05

Meeting abstract

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Author(s)

Dhayalan, Sathish Kumar

;

Nuytten, Thomas

;

;

;

Hikavyy, Andriy

;

Shimura, Yosuke

;

Vandervorst, Wilfried

Metrics

2042 since deposited on 2021-10-22

Acq. date: 2026-01-07