Publication:
C atom distribution in Si:C and Si:C:P epitaxial layers studied using Raman spectroscopy
Date
| dc.contributor.author | Dhayalan, Sathish Kumar | |
| dc.contributor.author | Nuytten, Thomas | |
| dc.contributor.author | Loo, Roger | |
| dc.contributor.author | Rosseel, Erik | |
| dc.contributor.author | Hikavyy, Andriy | |
| dc.contributor.author | Shimura, Yosuke | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Nuytten, Thomas | |
| dc.contributor.imecauthor | Loo, Roger | |
| dc.contributor.imecauthor | Rosseel, Erik | |
| dc.contributor.imecauthor | Hikavyy, Andriy | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.orcidimec | Nuytten, Thomas::0000-0002-5921-6928 | |
| dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
| dc.contributor.orcidimec | Hikavyy, Andriy::0000-0002-8201-075X | |
| dc.date.accessioned | 2021-10-22T19:03:20Z | |
| dc.date.available | 2021-10-22T19:03:20Z | |
| dc.date.issued | 2015-05 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/25212 | |
| dc.source.beginpage | 43 | |
| dc.source.conference | 9th International Conference on Silicon Epitaxy and Heterostructures - ICSI9 | |
| dc.source.conferencedate | 17/05/2015 | |
| dc.source.conferencelocation | Montreal Canada | |
| dc.source.endpage | 44 | |
| dc.title | C atom distribution in Si:C and Si:C:P epitaxial layers studied using Raman spectroscopy | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
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