Browsing by author "Li, Chenxi"
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EUV patterned templates with grapho-epitaxy DSA at the N5/N7 logic nodes
Gronheid, Roel; Boeckx, Carolien; Doise, Jan; Bekaert, Joost; Karageorgos, Ioannis; Ryckaert, Julien; Chan, BT; Li, Chenxi; Zou, Yi (2016)