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EUV patterned templates with grapho-epitaxy DSA at the N5/N7 logic nodes
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EUV patterned templates with grapho-epitaxy DSA at the N5/N7 logic nodes
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Date
2016
Proceedings Paper
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33280.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Gronheid, Roel
;
Boeckx, Carolien
;
Doise, Jan
;
Bekaert, Joost
;
Karageorgos, Ioannis
;
Ryckaert, Julien
;
Chan, BT
;
Li, Chenxi
;
Zou, Yi
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1894
since deposited on 2021-10-23
Acq. date: 2026-02-25
Citations
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Views
1894
since deposited on 2021-10-23
Acq. date: 2026-02-25
Citations