EUV patterned templates with grapho-epitaxy DSA at the N5/N7 logic nodes

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Authors
Gronheid, Roel; Boeckx, Carolien; Doise, Jan; Bekaert, Joost; Karageorgos, Ioannis; Ryckaert, Julien; Chan, BT; Li, Chenxi; Zou, Yi
Conference
Extreme Ultraviolet (EUV) Lithography VII
Title
EUV patterned templates with grapho-epitaxy DSA at the N5/N7 logic nodes
Publication type
Proceedings paper
Embargo date
9999-12-31
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