Browsing by author "Lopaev, Dimitri"

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Comparison between Vacuum Ultra-Violet emission of CF4/Ar and CF3I/Ar plasmas in CCP chamber for low-k etching

Zotovich, Alexey; El Otell, Ziad; de Marneffe, Jean-Francois; Proshina, Olga; Lopaev, Dimitri; Rakhimova, Tatyana; Baklanov, Mikhaïl (2016)
Low-k protection from F radicals and VUV photons using a multilayer pore grafting approach

Zotovich, Alexey; Rezvanov, Askar; Chanson, Romain; Zhang, L.; Hacker, N.; Kurchikov, K.; Klimin, S.; Zyryanov, S. M.; Lopaev, Dimitri; Gornev, E.; Clemente, I.; Miakonkikh, A.; Maslakov, K. (2018)