Publication:
Low-k protection from F radicals and VUV photons using a multilayer pore grafting approach
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1995 since deposited on 2021-10-26
2last month
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Acq. date: 2026-01-08
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1995 since deposited on 2021-10-26
2last month
1last week
Acq. date: 2026-01-08
Citations