Low-k protection from F radicals and VUV photons using a multilayer pore grafting approach

Zotovich, Alexey; Rezvanov, Askar; Chanson, Romain; Zhang, L.; Hacker, N.; Kurchikov, K.; Klimin, S.; Zyryanov, S. M.; Lopaev, Dimitri; Gornev, E.; Clemente, I.; Miakonkikh, A.; Maslakov, K.

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Low-k protection from F radicals and VUV photons using a multilayer pore grafting approach

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2018

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Journal of Physics D: Applied Physics

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Acq. date: 2026-01-25

Low-k protection from F radicals and VUV photons using a multilayer pore grafting approach

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