Browsing by author "Boehm, Klaus"

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Application of pixel-based mask optimization technique for high-transmission attenuated PSM

Sakajiri, Kyohei; Tritchkov, Alexander; Granik, Yuri; Hendrickx, Eric; Vandenberghe, Geert; Kempsell, Monica; Fenger, Germain; Boehm, Klaus; Scheruebl, Thomas (2009)