Application of pixel-based mask optimization technique for high-transmission attenuated PSM

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Authors
Sakajiri, Kyohei; Tritchkov, Alexander; Granik, Yuri; Hendrickx, Eric; Vandenberghe, Geert; Kempsell, Monica; Fenger, Germain; Boehm, Klaus; Scheruebl, Thomas
Conference
Design for Manufacturability through Design-Process Integration III
Title
Application of pixel-based mask optimization technique for high-transmission attenuated PSM
Publication type
Proceedings paper
Embargo date
9999-12-31
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