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Application of pixel-based mask optimization technique for high-transmission attenuated PSM
Publication:
Application of pixel-based mask optimization technique for high-transmission attenuated PSM
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Date
2009
Proceedings Paper
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17929.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Sakajiri, Kyohei
;
Tritchkov, Alexander
;
Granik, Yuri
;
Hendrickx, Eric
;
Vandenberghe, Geert
;
Kempsell, Monica
;
Fenger, Germain
;
Boehm, Klaus
;
Scheruebl, Thomas
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1920
since deposited on 2021-10-18
Acq. date: 2025-12-11
Citations
Metrics
Views
1920
since deposited on 2021-10-18
Acq. date: 2025-12-11
Citations