Browsing by author "Paul, S."
Now showing items 1-2 of 2
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Influence of halo implant on leakage current and sheet resistance of ultra-shallow p-n junctions
Faifer, V.N.; Schroder, D.K.; Current, M.I.; Clarysse, Trudo; Timans, P.J.; Zangerle, T.; Vandervorst, Wilfried; Wong, T.M.H.; Moussa, Alain; McCoy, S.; Gelpey, J.; Lerch, W.; Paul, S.; Bolze, D. (2007) -
Leakage current and dopant activation characterization of SDE/halo CMOS junctions with non-contact junction photo-voltage metrology
Faifer, V.N.; Schroder, D.K.; Current, M.I.; Clarysse, Trudo; Timans, P.J.; Zangerle, T.; Vandervorst, Wilfried; Wong, T.M.H.; Moussa, Alain; McCoy, S.; Gelpey, J.; Lerch, W.; Paul, S.; Bolze, D. (2007)