Authors

Faifer, V.N.; Schroder, D.K.; Current, M.I.; Clarysse, Trudo; Timans, P.J.; Zangerle, T.; Vandervorst, Wilfried; Wong, T.M.H.; Moussa, Alain; McCoy, S.; Gelpey, J.; Lerch, W.; Paul, S.; Bolze, D.

Conference

Frontiers of Characterization and Metrology for Nanoelectronics: 2007 (NIST)

Title

Leakage current and dopant activation characterization of SDE/halo CMOS junctions with non-contact junction photo-voltage metrology

Publication type

Proceedings paper